Author/Authors :
Li، نويسنده , , L.H. and Tian، نويسنده , , J.Z. and Cai، نويسنده , , X. and Chen، نويسنده , , Q.L and Xu، نويسنده , , M. and Wu، نويسنده , , Y.Q. and Fu، نويسنده , , Ricky K.Y and Chu، نويسنده , , Paul K.، نويسنده ,
Abstract :
Diamond-like carbon (DLC) films were deposited using vacuum arc deposition (VAD) and plasma immersion ion implantation and deposition (PIII and D). The surface morphologies of these films were investigated using atom force microscopy (AFM). Raman spectroscopy results show that the films have different microstructures. Based on the AFM images and Raman spectra, the aromatic ring cluster diameters hardly affect the surface morphology of the films, but the surface growth and nucleation are all subjected to the ion energies and the substrate temperature determines the surface morphology of the films.
Keywords :
Plasma immersion ion implantation , Deposition , surface morphology , Carbon films , Vacuum arc deposition
