Title of article
Effect of Pt film thickness on PtSi formation and film surface morphology
Author/Authors
Yin، نويسنده , , Jinghua and Cai، نويسنده , , Wei and Zheng، نويسنده , , Yufeng and Zhao، نويسنده , , Liancheng، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2005
Pages
6
From page
329
To page
334
Abstract
The effect of Pt film thickness on the formation of platinum silicide (PtSi) phase, distribution of silicides, and surface morphology of PtSi/Si films was investigated with X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD) and atomic force microscopy (AFM). It was shown that when the film structure was changed from PtSi/Si to Pt/Pt2Si+PtSi/PtSi/Si, the film morphology changed from a smooth surface to a coarse columnar structure with the increase of the Pt film thickness.
Keywords
Thickness , PtSi , surface morphology , Pt film
Journal title
Surface and Coatings Technology
Serial Year
2005
Journal title
Surface and Coatings Technology
Record number
1809830
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