Title of article
Study of deposition and post-oxidation of d.c. magnetron sputtered W/Fe bilayers
Author/Authors
Plantin، نويسنده , , P. E. Thomann، نويسنده , , A.-L. and Brault، نويسنده , , P. and Dumax، نويسنده , , B. and Mathias، نويسنده , , Frederic J. de Sauvage، نويسنده , , T. and Pineau، نويسنده , , A.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2005
Pages
5
From page
408
To page
412
Abstract
W/Fe bilayer metallic coatings are deposited by d.c. magnetron sputtering on an Fe substrate. Correlation between the deposition parameters and the film characteristics are investigated. The coatings exhibit small grain sizes and dense structure for high target power and low argon pressure, leading to well adhesive films. Bilayer post oxidation process is preformed in order to form Fe3O4 at the surface (W/Fe3O4). The ability of the Fe layer to be oxidised is also studied depending on the bilayer deposition parameters.
Keywords
Multilayer , sputtering , Magnetron , Tungsten , Iron , iron oxide
Journal title
Surface and Coatings Technology
Serial Year
2005
Journal title
Surface and Coatings Technology
Record number
1810088
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