• Title of article

    Study of deposition and post-oxidation of d.c. magnetron sputtered W/Fe bilayers

  • Author/Authors

    Plantin، نويسنده , , P. E. Thomann، نويسنده , , A.-L. and Brault، نويسنده , , P. and Dumax، نويسنده , , B. and Mathias، نويسنده , , Frederic J. de Sauvage، نويسنده , , T. and Pineau، نويسنده , , A.، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2005
  • Pages
    5
  • From page
    408
  • To page
    412
  • Abstract
    W/Fe bilayer metallic coatings are deposited by d.c. magnetron sputtering on an Fe substrate. Correlation between the deposition parameters and the film characteristics are investigated. The coatings exhibit small grain sizes and dense structure for high target power and low argon pressure, leading to well adhesive films. Bilayer post oxidation process is preformed in order to form Fe3O4 at the surface (W/Fe3O4). The ability of the Fe layer to be oxidised is also studied depending on the bilayer deposition parameters.
  • Keywords
    Multilayer , sputtering , Magnetron , Tungsten , Iron , iron oxide
  • Journal title
    Surface and Coatings Technology
  • Serial Year
    2005
  • Journal title
    Surface and Coatings Technology
  • Record number

    1810088