Author/Authors :
Kousal، نويسنده , , J. and Hanus، نويسنده , , J. and Choukourov، نويسنده , , A. and Hl?dek، نويسنده , , P. and Biederman، نويسنده , , H. and Slavinska، نويسنده , , D. and Zemek، نويسنده , , J.، نويسنده ,
Abstract :
In this contribution, results of RF (13.56 MHz) sputtering of polyisobutylene (PIB) and low density polyethylene (LDPE) are presented. The film was formed from species sputtered from the target or evaporated from the target surface due to thermal heating from the positive ion bombardment. When a certain power level was reached the evaporation dominated in the deposition process. The deposition rate sharply increased (more than one order of magnitude) and composition of the films changed. Films prepared in the evaporation mode were in general more similar in their structure to the original polymer.
