Micro-structured electrode arrays: Plasma based sterilization and coating over a wide pressure range

Micro-structured electrode (MSE) arrays consist of an interlocked comb-like electrode system with micron gap widths. These arrays are capable of generating large area uniform glow discharges up to atmospheric pressure. In order to ignite discharges at atmospheric pressure, this approach using the Paschen similarity law (pd=constant) is established beneath dielectric barrier arrays and plasma jets. The generated electric field strengths to ignite gas discharges apply only moderate radiofrequency (RF, 13.56 MHz) voltages. The electric parameters of the non-thermal plasma system are characterized by a special probe and the generated excited species of the plasma are observed by optical emission spectroscopy.