The synthesis of W–Ti–C films with a control of element composition by hybrid system

The synthesis of W–Ti–C multi phase film and the relationship between microstructure and composition were studied. W–Ti–C multi phase films, containing the W2C, TiC and WTiC, were successfully synthesized by hybrid system which was composed of arc ion plating (WC) and reactive magnetron sputtering (TiC). Chemical composition of each film was analyzed by Auger Electron Spectroscopy (AES). Also, microstructure of the W–Ti–C film was characterized by using X-ray diffraction (XRD) and Raman spectrometer. With increasing titanium composition, film phase transferred from W2C to WTiC and film hardness was decreased. In case of increasing carbon composition, TiC based multi phase film was formed at low carbon content and amorphous carbon or DLC (Me-C:H) film was formed at high carbon content. The film hardness was increased when the ratio of ‘(W + Ti) / C = 1’ and DLC was formed. Base on these results, we could present simple ternary diagram of W–Ti–C film as WTiC based, TiC based and amorphous carbon based multi phase films formation region.