Title of article :
Modelling and optimization of a low-pressure DC glow discharge in stable regime
Author/Authors :
Granda-Gutiérrez، نويسنده , , E.E. and Lَpez-Callejas، نويسنده , , Pedro R. and Peٌa-Eguiluz، نويسنده , , R. and Benيtez-Read، نويسنده , , J.S. and Pacheco-Sotelo، نويسنده , , J.O. and Valencia A.، نويسنده , , R. and Mercado-Cabrera، نويسنده , , A. and Barocio، نويسنده , , S.R.، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2007
Abstract :
A study, both theoretical and experimental, of the steady regime of a glow discharge is reported where a nitrogen plasma is produced by a DC power source operating at a constant current through a 200–500 mA range. Two different models of this plasma are developed. The first one was designed to reproduce the V–I characteristic curve where the transition from the background ionization regime to the saturation one takes place, and, from this, to the Townsend and breakdown regimes, respectively. The second model represents the plasma behaviour as that of a voltage operated current source which follows the power law depending on the gas pressure as i(υ) = Aυn(p). The experimental results confirm, to a high degree of coincidence, the predictions made by these models.
Keywords :
Discharges , DC , Ion implantation , Modelling , Low pressure discharges , Medium-density plasma
Journal title :
Surface and Coatings Technology
Journal title :
Surface and Coatings Technology