Title of article
Chromium oxide-based multilayer coatings deposited by reactive magnetron sputtering in an industrial setup
Author/Authors
Eklund، نويسنده , , P. and Mikkelsen، نويسنده , , N.-J. and Sillassen، نويسنده , , M. and Bienk، نويسنده , , E.J. and Bّttiger، نويسنده , , J.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2008
Pages
4
From page
156
To page
159
Abstract
Chromium oxide-based multilayers were deposited by reactive magnetron sputtering in an industrial setup by employing one-fold substrate rotation and cyclic variation of the O2 flow. This simple method allows deposition of multilayers comprising alternating layers of ~ 1 μm thickness of columnar α-Cr2O3 and mixed layers consisting of ~ 50 nm-thick sublayers of amorphous CrOx and nanocrystalline Cr2O3.
Keywords
X-Ray Diffraction (XRD) , Scanning electron microscopy (SEM) , Rutherford backscattering spectroscopy , Chromium oxide , Multilayer , reactive sputtering
Journal title
Surface and Coatings Technology
Serial Year
2008
Journal title
Surface and Coatings Technology
Record number
1819916
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