Structural, mechanical, tribological, and corrosion properties of a-SiC:H coatings prepared by PECVD

Amorphous hydrogenated silicon-carbide (a-SiC:H) coatings appear very attractive due to their superior optical and mechanical properties and chemical inertness. In the present work a-SiC:H coatings were prepared by PECVD on stainless steel 301 (SS301) and Ti–6Al–4V (TiAlV) substrates at a temperature of 300 °C, using different SiH4/CH4 precursor ratios. We systematically studied such mechanical properties as hardness, reduced Youngʹs modulus and elastic recovery using depth-sensing indentation, their tribological characteristics such as coefficient of friction and wear coefficient using the pin-on-disc method, as well as their corrosion and tribo-corrosion behaviors. a-SiC:H films (∼ 3 μm thick) prepared on SS301 and TiAlV at optimal deposition conditions exhibited a hardness of 23.5 GPa, reduced Youngʹs modulus of 160 GPa, and elastic rebound of 73%. They showed a friction coefficient of ∼ 0.35, and a wear rate of 10 × 10−6 mm3/Nm. These values are low compared to ∼ 0.85 and ∼ 0.5, 240 × 10−6 mm3/Nm and 700 × 10−6 mm3/Nm for SS301 and TiAlV, respectively. The films exhibited a very high corrosion and tribo-corrosion resistance on both metallic substrates. The coating behavior is correlated with the microstructure and composition, determined by complementary characterization techniques including ERD, FTIR and Raman analyses.