Structural and mechanical properties of nanostructured TiO2 thin films deposited by RF sputtering

This study mainly aims to evaluate the effects of substrate temperatures on the mechanical properties of TiO2 thin films deposited on glass substrates by radio-frequency (RF) magnetron sputtering. All titania films possess anatase structure having a nodular morphology. AES results reveal that Si and Na ions from glass diffuse into TiO2 films at higher substrate temperatures. Micro-scratch and wear tests were conducted to evaluate their mechanical and tribological properties. The adhesion critical loads of TiO2 films deposited at room temperature, 200 and 300 °C are found to be 1.51, 1.54 and 1.08 N, respectively. Scratch hardness also increases from 11.5 to 13.6 GPa with increasing temperature. The wear track width decreases with substrate temperature indicating an improved wear resistance at higher temperatures.