Quantitative measurements of sp3 content in DLC films with Raman spectroscopy

Hydrogenated and H-free diamond-like carbon (DLC) samples were prepared and 244 nm and 514 nm Raman spectra were collected and analyzed. Correlations between Raman spectra and sp3 content of DLC samples from this and previous studies have been analyzed. The dispersion rate of the G peak is shown to correlate linearly with the sp3 content of hydrogenated DLC samples, while the full-width-half-maximum of the G peak is shown to correlate nonlinearly with the sp3 content of H-free DLC samples. Quantitative relations are presented for measuring the sp3 content of both hydrogenated and H-free DLC.