Structural, electrical and mechanical properties of magnetron sputtered NiTi/PZT/TiOx thin film heterostructures

Shape memory alloy (NiTi) thin films coupled to ferroelectric lead zirconate titanate (PZT) produce an intelligent material capable of performing both sensing and actuating functions. In the present study, we report on the in-situ growth of NiTi/PZT/TiOx heterostructure on Pt/Ti/SiO2/Si substrates using magnetron sputtering technique. Deposition processing, microstructure, surface morphology, electrical properties and mechanical properties of these heterostructures were systematically investigated. The top NiTi films exhibit austenitic B2 structure with preferred (110) orientation. The varying thickness of NiTi films had a significant influence on properties of NiTi/PZT/TiOx heterostructure. The bottom TiOx layer was observed to favor the growth of perovskite PZT films with (100) orientation. Nanoindentation tests of these heterostructures were performed at room temperature. The mechanical hardness of the top NiTi layer of lower thickness was found to be highly influenced by underneath PZT layer. The heterostructure exhibited an interesting martensite to austenite phase transformation and polarization-electric field hysteresis behavior with remanent polarization (Pr) and the coercive field (Er) of 17.1 μC/cm2 and 69.6 kV/cm, respectively. These heterostructures having a layer of SMA material coupled to a ferroelectric material with underneath TiOx layer are of immense technological importance for MEMS devices.