Evaluation of composition, mechanical properties and structure of nc-TiC/a-C:H coatings prepared by balanced magnetron sputtering

Nanocomposites like nc-TiC/a-C:H show promising combinations of properties such as high hardness and Youngʹs modulus combined with low friction and wear. These properties can be furthermore tailored to suit particular industrial needs. In this paper, we report on the preparation and analyses of several μm thick and well adherent nc-TiC/a-C:H coatings with different stoichiometry. These coatings were deposited in a relatively low ion bombardment environment using magnetron sputtering of titanium target operated in well-balanced magnetic field configuration on high speed steel and hardmetal substrates. Gaseous hydrocarbon (acetylene) was added to the deposition chamber as source of carbon. Hardness and Youngʹs modulus of 46 GPa and 415 GPa respectively were reached.