Title of article :
Deposition of Pt and Sn doped CeOx layers on silicon substrate
Author/Authors :
Bruyère، نويسنده , , Stéphanie and Cacucci، نويسنده , , Arnaud and Potin، نويسنده , , Valérie and Matolinova، نويسنده , , Iva and Vorokhta، نويسنده , , Mykhailo and Matolin، نويسنده , , Vladimir، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2013
Abstract :
Radio Frequency Magnetron Sputtering is used to elaborate CeOx layers doped with platinum and/or tin on a SiO2/Si substrate. Morphology, chemical composition and crystallographic structures were investigated by Transmission Electron Microscopy. The presence of nanoparticles of mainly ceria and metallic platinum is exhibited.
Keywords :
Cerium oxide , SN , Magnetron sputtering , Thin film , TEM , PT
Journal title :
Surface and Coatings Technology
Journal title :
Surface and Coatings Technology
