Title of article
Structural and nanoindentation studies of epitaxial titanium oxynitride (001) films grown on MgO(001) substrate
Author/Authors
Do، نويسنده , , Hien and Dai، نويسنده , , Van-Truong and Tian، نويسنده , , Jr-Sheng and Yen، نويسنده , , Tzu Chun and Chang، نويسنده , , Li، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2014
Pages
6
From page
1
To page
6
Abstract
We investigate the effect of chemical composition and residual stress on the mechanical properties of high-quality epitaxial TiNxOy films deposited on MgO(001) substrates by using nanoindentation. The lattice parameters and residual strain/stress of TiNxOy films decrease as oxygen concentration increases. Hardness and Youngʹs modulus determined by nanoindentation are about 17–26 GPa and 355–430 GPa, respectively, which vary with chemical composition and residual stress.
Keywords
mechanical properties , Nanoindentation , Epitaxial titanium oxynitride
Journal title
Surface and Coatings Technology
Serial Year
2014
Journal title
Surface and Coatings Technology
Record number
1830645
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