Title of article :
Structurally tailored Cu(InxGa1 − x) Se2 thin films via RF magnetron sputtering
Author/Authors :
Jia، نويسنده , , Tao and Dong، نويسنده , , Lei and Zhao، نويسنده , , Zhiguo and Li، نويسنده , , Xifei and Li، نويسنده , , Dejun، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2014
Pages :
4
From page :
94
To page :
97
Abstract :
Cu(InxGa1 − x) Se2 (CIGS) thin films were deposited onto soda-lime glass substrates with Mo coating via the one step radio frequency (RF) magnetron sputtering without a post-selenization process at the substrate temperature varying from 550 °C to 630 °C. The effect of deposition temperature on the structural properties of CIGS thin films has been characterized by X-ray diffraction (XRD), Raman spectroscopy, field emission scanning electron microscopy (FESEM), and energy dispersive X-ray spectroscopy (EDX). It was found that an increased deposition temperature of up to 580 °C contributes to produce the smooth surface, large grain size, and increased crystallinity of the thin films. But further increased deposition temperature results in a decrease in smoothness and an increase in grain size. The optimized temperature (580 °C) shows the best effect on the composition and formation of the chalcopyrite structure without impurities.
Keywords :
Substrate temperature , Chalcopyrite , RF magnetron sputtering , Cu(InxGa1  , ?  , x)Se2 (CIGS) thin film
Journal title :
Surface and Coatings Technology
Serial Year :
2014
Journal title :
Surface and Coatings Technology
Record number :
1831677
Link To Document :
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