Title of article
IR laser photosensitized decomposition of trimethyl(2-propynyloxy)silane for chemical vapour deposition of polydimethylsiloxane phases
Author/Authors
Markéta Urbanov?، نويسنده , , Hiroshi Morita، نويسنده , , Vladislav D ?nek، نويسنده , , Zden k Bastl، نويسنده , , Jan ubrt، نويسنده , , Josef Pola، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1997
Pages
8
From page
219
To page
226
Keywords
Pyrolysiss , Trimethyl(2-propynyloxy)silane , Laser induced decomposition , Si/C/H/O films , Chemical vapour deposition
Journal title
Journal of Analytical and Applied Pyrolysis
Serial Year
1997
Journal title
Journal of Analytical and Applied Pyrolysis
Record number
188334
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