مرکز منطقه ای اطلاع رساني علوم و فناوري - Pressure-dependent rate coefficients of chemical reactions involving Si2H4 isomerization from QRRK calculations

Title of article :

Pressure-dependent rate coefficients of chemical reactions involving Si2H4 isomerization from QRRK calculations

Author/Authors :

A. Dollet، نويسنده , , S. de Persis، نويسنده ,

Issue Information :

روزنامه با شماره پیاپی سال 2007

Pages :

From page :

460

To page :

470

Keywords :

Silane pyrolysis , Disilene , Isomerization reactions , Pressure dependence , Kinetics , QRRK , Chemical vapor deposition

Journal title :

Journal of Analytical and Applied Pyrolysis

Serial Year :

2007

Journal title :

Journal of Analytical and Applied Pyrolysis

Record number :

189338

Link To Document :