Title of article :
Metallization and nanostructuring of semiconductor surfaces by galvanic displacement processes
Author/Authors :
Carraro، نويسنده , , Carlo and Maboudian، نويسنده , , Roya and Magagnin، نويسنده , , Luca، نويسنده ,
Issue Information :
ماهنامه با شماره پیاپی سال 2007
Abstract :
The deposition of metals on semiconductors encompasses a broad range of technologically important processes, with applications ranging from electronic devices to chemical sensors. Recent years have witnessed a surge of research activities in galvanic displacement processes on semiconductor substrates. After a brief review of the fundamental aspects underlying galvanic displacement processes on semiconductor surfaces, this paper discusses applications to micro- and nanoscale devices, including schemes developed for the metallization and nanopatterning of semiconductor substrates with high selectivity and with optimal interfacial properties.
Keywords :
Electrodeposition , Semiconductor surfaces , Metalization , Galvanic deposition , electroless deposition
Journal title :
Surface Science Reports
Journal title :
Surface Science Reports