• Title of article

    Metallization and nanostructuring of semiconductor surfaces by galvanic displacement processes

  • Author/Authors

    Carraro، نويسنده , , Carlo and Maboudian، نويسنده , , Roya and Magagnin، نويسنده , , Luca، نويسنده ,

  • Issue Information
    ماهنامه با شماره پیاپی سال 2007
  • Pages
    27
  • From page
    499
  • To page
    525
  • Abstract
    The deposition of metals on semiconductors encompasses a broad range of technologically important processes, with applications ranging from electronic devices to chemical sensors. Recent years have witnessed a surge of research activities in galvanic displacement processes on semiconductor substrates. After a brief review of the fundamental aspects underlying galvanic displacement processes on semiconductor surfaces, this paper discusses applications to micro- and nanoscale devices, including schemes developed for the metallization and nanopatterning of semiconductor substrates with high selectivity and with optimal interfacial properties.
  • Keywords
    Electrodeposition , Semiconductor surfaces , Metalization , Galvanic deposition , electroless deposition
  • Journal title
    Surface Science Reports
  • Serial Year
    2007
  • Journal title
    Surface Science Reports
  • Record number

    1893886