Title of article
Metallization and nanostructuring of semiconductor surfaces by galvanic displacement processes
Author/Authors
Carraro، نويسنده , , Carlo and Maboudian، نويسنده , , Roya and Magagnin، نويسنده , , Luca، نويسنده ,
Issue Information
ماهنامه با شماره پیاپی سال 2007
Pages
27
From page
499
To page
525
Abstract
The deposition of metals on semiconductors encompasses a broad range of technologically important processes, with applications ranging from electronic devices to chemical sensors. Recent years have witnessed a surge of research activities in galvanic displacement processes on semiconductor substrates. After a brief review of the fundamental aspects underlying galvanic displacement processes on semiconductor surfaces, this paper discusses applications to micro- and nanoscale devices, including schemes developed for the metallization and nanopatterning of semiconductor substrates with high selectivity and with optimal interfacial properties.
Keywords
Electrodeposition , Semiconductor surfaces , Metalization , Galvanic deposition , electroless deposition
Journal title
Surface Science Reports
Serial Year
2007
Journal title
Surface Science Reports
Record number
1893886
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