Microstructure devices for process intensification: Influence of manufacturing tolerances and design

Process intensification by miniaturization is a common task for several fields of technology. Starting from manufacturing of electronic devices, miniaturization with the accompanying opportunities and problems gained also interest in chemistry and chemical process engineering. While the integration of enhanced functions, e.g. integrated sensors and actuators, is still under consideration, miniaturization itself has been realized in all material classes, namely metals, ceramics and polymers. First devices have been manufactured by scaling down macro-scale devices. However, manufacturing tolerances, material properties and design show much larger influence to the process than in macro scale. Many of the devices generated alike the macro ones work properly, but possibly could be optimized to a certain extend by adjusting the design and manufacturing tolerances to the special demands of miniaturization. Thus, some considerations on the design and production of devices for micro process engineering should be made to provide devices which show reproducible and controllable process behavior. The aim of the following publication is to show the importance of considerations in manufacturing tolerances and dimensions as well as design of microstructures to avoid negative influences and optimize the process characteristics of miniaturized devices. Some examples will be shown to explain the considerations presented here.