Title of article :
Reaction-diffusion mechanisms for the chemical shrink process of nanofabrication
Author/Authors :
Li، نويسنده , , Tsung-Lung and Ting، نويسنده , , Jyh-Hua، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2005
Abstract :
The effectiveness of reaction-diffusion mechanisms on the formation of nanoscale polymer films in the chemical shrink process is investigated by a two-dimensional model. The model includes three mechanisms: the catalytic cross-linking reaction of water-soluble polymers and cross-linkers, the diffusion of photoacids, and the trapping of photoacids by the cross-linked polymers. It is found that, although the cross-linking reaction is the vital mechanism for the chemical shrink process, it is much less effective on the formation of nanoscale polymer films than the photoacids diffusion and trapping mechanisms.
Journal title :
Chemical Physics Letters
Journal title :
Chemical Physics Letters