Periodic arrays of nanostructures in silicon and gallium arsenide by near-field enhanced laser irradiation in liquid precursors

A simple approach to fabricate periodic arrays of ring bumps, disk and convex bumps or holes on silicon and gallium arsenide substrates is reported. In the process, a mono or double layer of 700 nm diameter silica colloidal particles were self-assembled on the substrates and a single pulse from a 200 fs laser at 387 nm wavelength was applied. The surfaces were irradiated at normal incidence by immersing the substrates in a glass container filled with acetone, carbon tetrachloride and 1,1,2-trichlor-trifluorethan liquid precursors. The influence of the medium on the near-field interactions for both substrates is investigated.