مرکز منطقه ای اطلاع رساني علوم و فناوري - Hybrid machine learning system for integrated yield management in semiconductor manufacturing

Title of article :

Hybrid machine learning system for integrated yield management in semiconductor manufacturing

Author/Authors :

Boo-Sik Kang، نويسنده , , Jang-Hee Lee، نويسنده , , Chung-Kwan Shin، نويسنده , , Song-Jin Yu، نويسنده , , Sang-Chan Park، نويسنده ,

Issue Information :

روزنامه با شماره پیاپی سال 1998

Pages :

From page :

123

To page :

132

Keywords :

Inductive learning , Neural networks , Yield management , knowledge based system

Journal title :

Expert Systems with Applications

Serial Year :

1998

Journal title :

Expert Systems with Applications

Record number :

197658

Link To Document :