Title of article :
The implementation of neural network for semiconductor PECVD process
Author/Authors :
Wen-Chin Chen، نويسنده , , Amy H.I. Lee، نويسنده , , Wei-Jaw Deng، نويسنده , , Kan-Yuang Liu، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2007
Pages :
6
From page :
1148
To page :
1153
Keywords :
back-propagation neural network , Silicon dioxidefilms , Plasma-enhanced chemical vapor deposition (PECVD) , Taguchi method , Quality predictor
Journal title :
Expert Systems with Applications
Serial Year :
2007
Journal title :
Expert Systems with Applications
Record number :
198604
Link To Document :
https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=198604
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