Title of article
Data mining for yield enhancement in semiconductor manufacturing and an empirical study
Author/Authors
Chen-Fu Chien، نويسنده , , Wen-Chih Wang، نويسنده , , Jen-Chieh Cheng، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2007
Pages
7
From page
192
To page
198
Keywords
DATA MINING , Decision tree , Clustering , Defect diagnosis , Yield enhancement , semiconductor manufacturing
Journal title
Expert Systems with Applications
Serial Year
2007
Journal title
Expert Systems with Applications
Record number
198628
Link To Document