• Title of article

    Data mining for yield enhancement in semiconductor manufacturing and an empirical study

  • Author/Authors

    Chen-Fu Chien، نويسنده , , Wen-Chih Wang، نويسنده , , Jen-Chieh Cheng، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2007
  • Pages
    7
  • From page
    192
  • To page
    198
  • Keywords
    DATA MINING , Decision tree , Clustering , Defect diagnosis , Yield enhancement , semiconductor manufacturing
  • Journal title
    Expert Systems with Applications
  • Serial Year
    2007
  • Journal title
    Expert Systems with Applications
  • Record number

    198628