An optimal target-filter system for electron beam generated X-ray spectra

An electron beam generated X-ray spectrum consists of characteristic X-rays of the target and continuous bremsstrahlung. The percentage of characteristic X-rays over the entire energy spectrum depends on the beam energy and the filter thickness. To determine the optimal electron beam energy and filter thickness, one can either conduct many experimental measurements, or perform a series of Monte Carlo simulations. Monte Carlo simulations are shown to be an efficient tool for determining the optimal target-filter system for electron beam generated X-ray spectra. Three of the most commonly used low-energy X-ray metal targets (Cu, Zn and Mo) are chosen for this study to illustrate the power of Monte Carlo simulations.