3B1 beam line and its physical properties

The 3B1 beam line is in the hall of 13# on BSRF, and is used for the lithography, biology and multilayer reflection research. On the line, there are a cylinder mirror system, a vacuum control system, an exposure chamber and a beryllium window for lithography research. The mirror coated with gold receives the synchrotron radiation at a glance angle of 1.5°, and scans in the vertical for lithography. The light, reflected by the scanning mirror and absorbed by the window, produces a spectrum of 4–20 Å and a uniformity spot for the lithography.