Title of article :
Preparation of actinide targets by radio-frequency sputtering
Author/Authors :
Drapchinsky، نويسنده , , L.V and Shpakov، نويسنده , , V.I، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 1995
Abstract :
The preparation of actinide targets by radio-frequency sputtering in Ar is described. Utilizing this method, it was possible to deposit actinide layers onto flat metal disk backings with a high thickness uniformity and a material collection efficiency on the backing of up to 40%.
Journal title :
Nuclear Instruments and Methods in Physics Research Section A
Journal title :
Nuclear Instruments and Methods in Physics Research Section A
