Development of current-based microscopic defect analysis methods and associated optical filling techniques for the investigation on highly irradiated high resistivity silicon detectors

Current based microscopic defect analysis methods such as current deep level transient spectroscopy (I-DLTS) and thermally stimulated current (TSC) have been further developed in accordance with the need for the defect analysis of highly irradiated (Φn > 1013 n/cm2) high resistivity silicon detectors. The new I-DLTS/TSC system has a temperature range of 8 K ≤ T ≤ 450 K and a high sensitivity that can detect a defect concentration of less than 1010/cm3 (background noise as low as 10 fA). A new filling method using different wavelength laser illumination has been applied, which is more efficient and suitable than the traditional voltage pulse filling. It has been found that the filling of a defect level depends on such factors as the total concentration of free carriers generated or injected, the penetration length of the laser (laser wavelength), the temperature at which the filling is taking place, as well as the decay time after the filling (but before the measurement). The mechanism of the defect filling can be explained by the competition between trapping and detrapping of defect levels, possible capture cross section temperature dependence, and interaction among various defect levels in terms of charge transferring. Optimum defect filling conditions have been suggested for highly irradiated high resistivity silicon detectors.