Title of article
Fabrication of Nb and Ta/Al/AlOx/Al/Nb tunneling junction X-ray detectors: a list of problems
Author/Authors
Nussbaumer، نويسنده , , Th and Finkbeiner، نويسنده , , F and Lerch، نويسنده , , Ph and Zehnder، نويسنده , , A and Ott، نويسنده , , H.R، نويسنده ,
Pages
2
From page
115
To page
116
Abstract
A whole wafer fabrication procedure using selective etching of refractory materials to produce Nb- or Ta/Al/AlOxAl/Nb tunneling X-ray detectors is discussed. Fabrication aspects and preliminary results are presented.
Journal title
Astroparticle Physics
Record number
1996985
Link To Document