Author/Authors :
W and Djotni، نويسنده , , K and Torre، نويسنده , , J.-P and Wang، نويسنده , , K and Pesty، نويسنده , , F and Dumoulin، نويسنده , , L and Mangin، نويسنده , , J and Garoche، نويسنده , , P، نويسنده ,
Abstract :
Recent advances in thin-film thermometers and membranes allow the development of all-thin-film high-sensitivity thermal detectors. We present here three developments, using a sequential sputtering method and patterning: first, a single interdigited sensor, second, a matrix of five identical discrete sensors, and third, a micro-bolometer. We describe the film deposition process and we evaluate the theoretical performance of the devices.
