Title of article :
Growth of high purity GaAs using low-pressure vapour-phase epitaxy
Author/Authors :
Adams، نويسنده , , R.L.، نويسنده ,
Pages :
4
From page :
125
To page :
128
Abstract :
The growth of high purity films of gallium arsenide using growth rates of greater than 1 μm/minute has been demonstrated using Low-Pressure Vapour-Phase Epitaxy. These films have been found to be suitable for high energy particle detectors and high voltage Schottky diodes.
Keywords :
LPVPE , Low-pressure vapour-phase epitaxy , GaAs
Journal title :
Astroparticle Physics
Record number :
2002404
Link To Document :
بازگشت