Author/Authors :
Sugai، نويسنده , , I and Oyaizu، نويسنده , , M and Kawakami، نويسنده , , H and Hattori، نويسنده , , T and Tomizawa، نويسنده , , H and Kawasaki، نويسنده , , K، نويسنده ,
Abstract :
Heavy ion-beam sputtering with low beam voltage was found to be applicable for the preparation of long-lived carbon stripper foils. A test foil (25 μg/cm2) made by this method survived an integrated ion current of 6213 mC/cm2 corresponding a lifetime of about 200 times the best commercially available foil made by evaporation-condensation. The present method can be expected to be applicable to magnetron sputtering for mass production of carbon stripper foils.
Keywords :
Carbon stripper , Electron diffraction , sputtering , Stripper lifetime , Vacuum deposition , Purity of target
