Title of article
Capacitive sensor of absolute coordinate
Author/Authors
Madorsky، نويسنده , , A.V. and Repkov، نويسنده , , V.V.، نويسنده ,
Pages
3
From page
279
To page
281
Abstract
A capacitive sensor of absolute coordinate with 100 mm range, 10 μm accuracy and 1 μm resolution has been developed. The measuring structure is manufactured using standard Printed Circuit Board Technology.
Journal title
Astroparticle Physics
Record number
2003973
Link To Document