Author/Authors :
Chkhalo، نويسنده , , N.I. and Kirpotin، نويسنده , , A.N. and Kruglyakov، نويسنده , , E.P. and Semenov، نويسنده , , E.P.، نويسنده ,
Abstract :
The design of a reflectometer for testing optical components within the range of 0.7–120 nm is described. The reflectometer covers all scanning regimes with a minimum step in θ of 9 angular seconds. The specimen can be moved across the X-ray beam within the limits of ±7.5 cm. The design of the apparatus envisages keeping the position of goniometer zeros after vacuum pumping. The reflectometer is designed for the study of diffraction gratings, and multilayer and grazing incident X-ray mirrors.
