X-ray diffraction of samples irradiated by intensive atomic flows of low energy

Experiments on the irradiation of titanium and niobium targets by flows of carbon atoms of low energy (〈W〉 ∼ 2.5 keV, j ∼ 50 mA/cm2) were made with a source of fast heavy atoms. Diagnostics of the irradiated samples was conducted by X-ray diffraction on the “anomalous scattering” station SR (the Budker INP). The measured thicknesses of the carbide layers (3.5 μm for TiC, 0.8 μm for Nb2C) show the possibility of a high effective implantation by low energy atomic flows.