Author/Authors :
Berg، نويسنده , , F.D.van den and Marel، نويسنده , , J.van der and Eijk، نويسنده , , C.W.E.van and Hollander، نويسنده , , R.W and Sarro، نويسنده , , P.M، نويسنده ,
Abstract :
The microgap couter (MGC) is a promising development in the field of small gas-filled position sensitive detectors. In the MGC the anode strips are carried by small insulating ridges of SiO2 or polyimide, that are mounted on top of the cathode strips. The exact widths of the anode and the insulator strips can play an important role in the maximum attainable gas gain.
sent results of a study of the gas gain and the maximum anode–cathode potential for anode widths running from 4 to 15 μm and SiO2 strip widths between 6 and 30 μm.
e realisation of these micro-structures in standard IC technology, we use a wafer stepper machine with a step size of 1×1 cm2. Despite this surface limitation, we have managed to enlarge the MGC to an active area of 5×5 cm2. Details about this project will be highlighted.
