Performance of resistive-charge position sensitive detectors for RBS/Channeling applications

The performance of two types of 1×1 cm2 photodiode position sensitive detectors (PSDs) based on resistive charge division was evaluated for their use in Rutherford Backscattering/Channeling (RBS/C) experiments in blocking geometry. Their energy resolution was first determined for ~ 5.5 MeV alpha particles from a radioactive sources, and values of full width half maximum (FWHM) of 22 keV and 33 keV were achieved using a shaping time constant of τ = 2.0 μ s . Additional tests were performed using backscattered 4He particles from the 2.0 MeV beam of a Van de Graaff accelerator. While the 22 keV FWHM detector failed after exposure to less than 5×106 cm−2 4He particles, the other did not show any noticeable deterioration due to radiation damage for a fluence of 4×108 cm−2. For this type of PSD position resolution ( τ = 0.5 μ s ) standard deviations of Δ L = 0.072 mm at ~ 5.5 MeV and Δ L = 0.247 mm at 1.1 MeV were achieved. anneling experiments using PSD were performed on several crystalline samples, showing that this setup seems suitable for lattice location studies, particularly for heavy ions implantation ( D ≳ 10 15 at / cm 2 ) on light substrates like Si, SiC, and AlN.