Title of article :
Modeling and control of MEMS with high speed synchronous micromotors and controllers/drivers-on-VLSI-chip Ics
Author/Authors :
Sergey Edward Lyshevski، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2003
Keywords :
MEMS , modeling , control , Synchronous micromotors , VLSI
Journal title :
Energy Conversion and Management
Journal title :
Energy Conversion and Management