New experimental and analysis methods in I-DLTS

A simple modification to traditional experimental apparatus to perform I-DLTS measurements is presented. This setup is shown to be faster and more sensitive than traditional double boxcar I-DLTS systems. A novel analysis technique utilising multiple exponential fits to the I-DLTS signal from a highly neutron irradiated silicon sample is presented along with a discussion of the results. It is shown that the new method has better resolution and can deconvolute overlapping peaks more accurately than previous methods.