Title of article :
Update on scribe–cleave–passivate (SCP) slim edge technology for silicon sensors: Automated processing and radiation resistance
Author/Authors :
Fadeyev، نويسنده , , V. and Ely، نويسنده , , S. and Galloway، نويسنده , , Z. and Ngo، نويسنده , , J. and Parker، نويسنده , , C. and Sadrozinski، نويسنده , , H.F.-W. and Christophersen، نويسنده , , M. and Phlips، نويسنده , , B.F. and Pellegrini، نويسنده , , G. and Rafi، نويسنده , , J.M. and Quirion، نويسنده , , D. and Dalla Betta، نويسنده , , G.-F. and Boscardin، نويسنده , , M. and Casse، نويسنده , , G. and Gorelov، نويسنده , , I. and Hoeferkamp، نويسنده , , M. E. METCALFE، نويسنده , , J. and Seidel، نويسنده , , S. and Gaubas، نويسنده , , E. and Ceponis، نويسنده , , T. and Vaitkus، نويسنده , , J.V.، نويسنده ,
Pages :
5
From page :
59
To page :
63
Abstract :
We pursue scribe–cleave–passivate (SCP) technology for making “slim edge” sensors. The goal is to reduce the inactive region at the periphery of the devices while maintaining their performance. In this paper we report on two aspects of the current efforts. The first one involves fabrication options for mass production. We describe the automated cleaving tests and a simplified version of SCP post-processing of n-type devices. Another aspect is the radiation resistance of the passivation. We report on the radiation tests of n- and p-type devices with protons and neutrons.
Keywords :
scribing , Active area , passivation , Slim edge , Cleaving , radiation
Journal title :
Astroparticle Physics
Record number :
2009225
Link To Document :
https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=2009225
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