Author/Authors :
Iris Jastram، نويسنده , , A. and Harris، نويسنده , , H.R. and Mahapatra، نويسنده , , R. and Phillips، نويسنده , , J. O. Platt، نويسنده , , M. and Prasad، نويسنده , , K. F. Sander، نويسنده , , J. and Upadhyayula، نويسنده , , S.، نويسنده ,
Abstract :
A dedicated facility has been commissioned for Cryogenic Dark Matter Search (CDMS) detector fabrication at Texas A&M University (TAMU). The fabrication process has been carefully tuned using this facility and its equipment. Production of successfully tested detectors has been demonstrated. Significant improvements in detector performance have been made using new fabrication methods/equipment and tuning of process parameters.
Keywords :
Photolithography , Semiconductor detector , Cryogenic detector , Dark matter , Transition edge sensor , CDMS
