Title of article
Cryogenic Dark Matter Search detector fabrication process and recent improvements
Author/Authors
Iris Jastram، نويسنده , , A. and Harris، نويسنده , , H.R. and Mahapatra، نويسنده , , R. and Phillips، نويسنده , , J. O. Platt، نويسنده , , M. and Prasad، نويسنده , , K. F. Sander، نويسنده , , J. and Upadhyayula، نويسنده , , S.، نويسنده ,
Pages
12
From page
14
To page
25
Abstract
A dedicated facility has been commissioned for Cryogenic Dark Matter Search (CDMS) detector fabrication at Texas A&M University (TAMU). The fabrication process has been carefully tuned using this facility and its equipment. Production of successfully tested detectors has been demonstrated. Significant improvements in detector performance have been made using new fabrication methods/equipment and tuning of process parameters.
Keywords
Photolithography , Semiconductor detector , Cryogenic detector , Dark matter , Transition edge sensor , CDMS
Journal title
Astroparticle Physics
Record number
2009780
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