Co-axial multicusp source for low axial energy spread ion beam production

A co-axial multicusp ion source has been designed and tested. This source uses a new magnetic filter configuration. This magnetic filter is efficient in modifying the plasma potential distribution which can reduce the axial energy spread of the extracted ion beam. Energy spreads as low as 0.6 eV have been obtained. The electron temperature in this source has also been found to be about 0.1 eV. Furthermore, the new source configuration is capable of adjusting the radial plasma potential distribution which can improve the transverse ion energy, which results in a low beam emittance. The co-axial source can be used for a number of different applications such as ion projection lithography and radioactive ion beam projets.