Development of a micro-array-type electron multiplier

This paper describes the development of a micro-array-type electron multiplier (MAEM) and its application to preamplification of a hybrid photo diode (HPD) system. The MAEM consists of several dynode plates fabricated by micromachining techniques. In our simulation of the electron multiplication process in the HPD system, 4500 gain is easily obtained with the total voltage of 6 kV. No spread of electron charges into the neighboring channels is observed in the MAEM device. Consequently, very high position resolution can be achieved if the pixel-type PD is used with the MAEM. The simulation also showed small fluctuation of the electron transit time of 23 ps in the MAEM, thus very high timing resolution can be achieved.