Case Study on the Process Constraints Observed In Micro-Fabrication of a Pressure Sensor.

Scaling down of devices was done to incorporate it to the integrated industry which led to micro-fabrication, the fabrication process where the dimensions of the devices are in microns. Bulk and surface micro-fabrication or micro-machining are two known processes. In bulk micro-machining, the bulk materials are etched out to curve out the device, whereas surface micro-machining is based on deposition and etching of different structural layers on top of the substrate. For surface micro-machining, because of its intricate steps, certain process constraints were observed while fabricating a pressure sensor. These process constraints have to be avoided to obtain a reasonable agreement with the specification specified before fabrication of micro-sensors.