Author/Authors :
Irwin، نويسنده , , K.D and Hilton، نويسنده , , G.C and M. Martinis، نويسنده , , John and Deiker، نويسنده , , S and Bergren، نويسنده , , N and Nam، نويسنده , , S.W and Rudman، نويسنده , , D.A and Wollman، نويسنده , , D.A، نويسنده ,
Abstract :
We describe a superconducting transition-edge microcalorimeter with an energy resolution of 4.5±0.1 eV full-width at half-maximum (FWHM) for Mn Kα X-rays from an 55Fe source. The thermometer consists of a photolithographically patterned Mo–Cu superconducting proximity bilayer with a 93 mK transition temperature. The device is fabricated on a Si3N4 membrane patterned as a “flyswatter” to control the thermal conductance to the heat bath. The sensor is voltage biased with an on-chip shunt resistor, and the current is measured by a two-stage SQUID amplifier consisting of a single first-stage SQUID and a series-array second-stage SQUID.