Author/Authors :
Fukuda ، نويسنده , , Daiji and Takahashi، نويسنده , , Hiroyuki and Ohno، نويسنده , , Masashi and Nakazawa، نويسنده , , Masaharu، نويسنده ,
Abstract :
We are developing X-ray microcalorimeters using iridium superconducting transition edge sensor. The Ir films have been fabricated by a magnetron sputtering method and patterned by a photolithography technique. Initial results on the performance of the Ir TES measured at low temperature are presented.
