Author/Authors :
De Moor، نويسنده , , P and Belmans، نويسنده , , W and Baert، نويسنده , , K and Van Hoof، نويسنده , , C and Verbist، نويسنده , , A and Oberstedt، نويسنده , , A and Vanneste، نويسنده , , L، نويسنده ,
Abstract :
Specific experiments, from solid state to elementary particle physics, require use of high-resolution particle detection in magnetic fields. When carefully designed, low-temperature microcalorimeters provide excellent energy resolution and low threshold. First results of Si-based microcalorimeters using state-of-the art implantation and bulk micromachining techniques are presented.
