Title of article :
Study of properties of irradiated PMMA by the method of thin sections
Author/Authors :
M.B. El-Kholi، نويسنده , , A and Mohr، نويسنده , , J and Nazmov، نويسنده , , V، نويسنده ,
Abstract :
In deep-etch X-ray lithography while specific absorption dose changes with depth of PMMA layer. Properties of PMMA material change more quickly with depth. Mean molecular weight, mean molecular number and glass transition temperature versus absorption dose up to 20 kJ/cm3 were investigated.
Keywords :
melting point , poly(methyl methacrylate) , Synchrotron radiation , Mean molecular weight
Journal title :
Astroparticle Physics
