Measurement of the soft X-ray response of P-channel back-illuminated CCD

P-channel charge-coupled devices (CCDs) made from N-type silicon wafers were originally developed for ground-based optical and near-infrared telescopes. The thick depletion layer of these CCDs provides the significant advantage of high quantum efficiency (QE) for hard X-rays. On the other hand, high QE for soft X-rays is obtained with back-illuminated (BI) and fully depleted CCDs in which only a thin dead layer exists on the surface of incidence. Thus, P-channel BI CCDs can be applicable as superior wide band X-ray detectors. We have developed such a device specifically for the Soft X-ray Imager (SXI) on board the X-ray astronomy satellite ASTRO-H, scheduled to be launched in 2014. We previously reported that the depletion layers of our CCDs, a prototype of SXI-CCDs, have a thickness of more than 200 μ m . In this paper, we report a novel soft X-ray response of P-channel BI CCDs. First, we irradiate fluorescent X-rays of O, F, Na, Al, Si and K to the SXI prototype. This experiment reveals that our CCD has a significant low-energy tail structure in the soft X-ray response. Since the intensity of the low-energy tail is larger for lower X-ray energies, the tail is originated on the CCD surface layer. Then, we fabricate a new type of CCDs by applying an alternative treatment to its surface layer. The soft X-ray response of the CCD is measured by irradiation of monochromatic X-rays from 0.25 keV to 1.8 keV in a synchrotron facility, KEK-PF. The intensity of the low-energy tail for 0.5 keV incident X-ray is one order of magnitude smaller than that for the previous CCD. The same treatment will be applied to the surface layer of the SXI flight model.